Global Standards for the Microelectronics Industry
Gate Dielectric Breakdown
JESD263
Published: Mar 2024
This document describes procedures developed for estimating the overall integrity of gate dielectrics.
JESD263 supersedes these other 4 standards: JESD35A, JESD35-1 ADDENDUM, JESD35-2 and JESD92.
Committee(s): JC-14, JC-14.2
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