Global Standards for the Microelectronics Industry
temperature coefficient of resistance [TCR(Tref)]
The fractional change in resistance of the test structure per unit change in temperature at a specified temperature Tref, as described in the following equation:
where
R(Tref) is the resistance of the test structure at temperature Tref (Ω);
ΔR is the change in resistance (Ω);
ΔT is the change in temperature that caused the change in resistance (°C).
References:
JEP119A, 8/03
JESD33B#, 2/04
JESD61, 4/97