Global Standards for the Microelectronics Industry
(1) The degree to which a process metric or output responds to the stimulation of an input.
(2) The change in a parameter divided by the change in a circuit variable other than temperature.
NOTE This quotient is the average value over the total change of the circuit variable. The change in the parameter may or may not be normalized to a reference value of the parameter. The specific term should be "(circuit variable) sensitivity".