metal-oxide-semiconductor (MOS) technology

A subcategory of metal-insulator-semiconductor (MIS) technology in which the insulator employed is an oxide of the semiconductor substrate material.

NOTE The term MOS is often misused to include other categories of insulated-gate technology such as MNOS (metal-nitride-oxide-semiconductor) and SIS (silicon-gate-insulator semiconductor).

References: 

JESD99B, 5/07