Global Standards for the Microelectronics Industry
layer, inversion
A surface region of a semiconductor device whose conductivity type has been reversed from that produced by the net fixed charge density of ionized donors and acceptors due to charge carrier attraction.
NOTE The charge carrier attraction may be caused by a field-plate voltage such as in field-effect transistors or by unwanted charge residing in surface states, insulating layers, or surface ionic species.
References:
JESD99B, 5/07