Global Standards for the Microelectronics Industry
design of experiments (DOE)
(1) An efficient method of experimentation that identifies factors that affect the mean and variation with minimum testing.
(2) A systematic approach to varying the input-controllable variables in the process and analyzing the effects of these process variables on the outputs. When employed in conjunction with statistical process controls, it can minimize process variability.
References:
JEP131A, 5/05
JEP132, 7/98
