Global Standards for the Microelectronics Industry
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GUIDELINE FOR INTERNAL GAS ANALYSIS FOR MICROELECTRONIC PACKAGESStatus: Reaffirmed November 2020
This guideline is applicable to hermetically sealed microelectronic components (including discrete semiconductors, monolithic and hybrid microcircuits). Specific cases with unique packaging, materials, or environmental constraints may not find all of the following information and procedures applicable.