planar (device and process)

A type of semiconductor device and the process technology used to fabricate it, in which all of the p-n junctions terminate at approximately the same geometric plane on the surface of the semiconductor.

NOTE Devices using similar technologies, but having one or more diffused areas lying in a slightly different, parallel plane, are also considered planar (e.g., buried collector).

References

JESD99B, 5/07

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