etch pit (1) (general)

A small peak or hole produced by chemical etching at the site of an imperfection in a semiconductor or other surface and caused by the differing etch rate at the point of imperfection.

(2) (in a package): A surface depression or crater caused by chemical milling (etching) through a defect in the photoresist pattern.

References

JESD99B, 5/07

JESD27, 8/93

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